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  1. 1
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    Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia / Paul D. Franzon, chair/editor ; sponsored ... by SPIE--the In...

    Published 2001
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
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  2. 2
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    MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK / Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE-...

    Published 2001
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
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  3. 3
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    Micromachine technology for diffractive and holographic optics : 20-21 September 1999, Santa Clara, California / Sing H. Lee, J. Allen Cox, chairs/editors ; sponsored by SPIE--the...

    Published 1999
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
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  4. 4
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    MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA / Henry Helvajian, Siegfried W. Janson, Franz Lärm...

    Published 2001
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
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  5. 5
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    MEMS components and applications for industry, automobiles, aerospace, and communication 22-23 October 2001, San Francisco, USA / Henry Helvajian, Siegfried W. Janson, Franz Lärmer...

    Published 2001
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
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  6. 6
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    MEMS components and applications for industry, automobiles, aerospace, and communication II : 28-29 January 2003, San Jose, California, USA / Siegfried W. Janson, chair/editor ; sp...

    Published 2003
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”

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  7. 7
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    MEMS components and applications for industry, automobiles, aerospace, and communication II 28-29 January 2003, San Jose, California, USA / Siegfried W. Janson, chair/editor ; spon...

    Published 2003
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”

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  8. 8
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    Indo-Russian Workshop on Micromechanical Systems : 2-4 February 1999, New Delhi, India / Alexander M. Prokhorov, V.S. Ramamurthy, chairs ; Vladimir I. Pustovoy, Vinoy K. Jain, edit...

    Published 1999
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
    Conference Proceeding Book

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  9. 9
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    Design, characterization, and packaging for MEMS and microelectronics 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/edit...

    Published 1999
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”

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  10. 10
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    Design, characterization, and packaging for MEMS and microelectronics II 17-19 December, 2001, Adelaide, Australia / Paul D. Frnazon, chair/editor ; sponsored and published by SPIE...

    Published 2001
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
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  11. 11
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    Design, modeling, and simulation in microelectronics : 28-30 November 2000, Singapore / Bernard Courtois, Serge N. Demidenko, L.Y. Lau, chairs/editors ; sponsored by Nanyang Techno...

    Published 2000
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
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  12. 12
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    Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/ed...

    Published 1999
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
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  13. 13
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    MEMS/NEMS technology and applications 2008 International Conference on Optical Instruments and Technology : 16-19 November 2008, Beijing, China / Zhaoying Zhou [and others], editor...

    Published 2009
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”

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  14. 14
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    2009 International Conference on Optical Instruments and Technology MEMS/NEMS technology and applications : 19-21 October 2009, Shanghai, China / Zhaoying Zhou [and others], editor...

    Published 2009
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”

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    Electronic Conference Proceeding eBook

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  15. 15
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    Micromachine technology for diffractive and holographic optics 20-21 September 1999, Santa Clara, California / Sing H. Lee, J. Allen Cox, chairs/editors ; sponsored by SPIE--the In...

    Published 1999
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
    Full Text (via SPIE Digital Library)
    Electronic eBook

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  16. 16
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    MEMS design, fabrication, characterization, and packaging 30 May-1 June 2001, Edinburgh, UK / Uwe F.W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--t...

    Published 2001
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
    Full Text (via SPIE Digital Library)
    Electronic eBook

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  17. 17
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    Indo-Russian Workshop on Micromechanical Systems 2-4 February 1999, New Delhi, India / Alexander M. Prokhorov, V.S. Ramamurthy, chairs ; Vladimir I. Pustovoy, Vinoy K. Jain, editor...

    Published 1999
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
    Full Text (via SPIE Digital Library)
    Electronic Conference Proceeding eBook

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  18. 18
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    Design, modeling, and simulation in microelectronics 28-30 November 2000, Singapore / Bernard Courtois, Serge N. Demidenko, L.Y. Lau, chairs/editors ; sponsored by Nanyang Technolo...

    Published 2000
    Subjects: “…Microelectromechanical systems Design and construction Congresses.…”
    Full Text (via SPIE Digital Library)
    Electronic eBook

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