Handbook of thin film deposition / edited by Krishna Seshan, Dominic Schepis.

Handbook of thin film deposition, Fourth edition, is a comprehensive reference focusing on thin film technologies and applications used in the semiconductor industry and the closely related areas of thin film deposition, thin film micro properties, photovoltaic solar energy applications, materials f...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Other Authors:	Seshan, Krishna (Editor), Schepis, Dominic (Editor)
Format:	eBook
Language:	English
Published:	Oxford, United Kingdom ; Cambridge, MA, United States : William Andrew, an imprint of Elsevier, [2018]
Edition:	Fourth edition.
Subjects:	Thin films > Handbooks, manuals, etc. Thin film devices > Design and construction. Thin films. Handbooks and manuals.