Handbook of silicon wafer cleaning technology / editors, Karen A. Reinhardt, Werner Kern.

Handbook of Silicon Wafer Cleaning Technology, Third Edition, provides an in-depth discussion of cleaning, etching and surface conditioning for semiconductor applications. The fundamental physics and chemistry associated with wet and plasma processing are reviewed, including surface and colloidal as...

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Bibliographic Details
Online Access:	Full Text (via ScienceDirect)
Other Authors:	Reinhardt, Karen A. (Editor), Kern, Werner, 1925- (Editor)
Format:	eBook
Language:	English
Published:	Cambridge, MA : William Andrew, [2018]
Edition:	Third edition.
Series:	Materials science and process technology series.
Subjects:	Silicon-on-insulator technology.