Handbook of silicon wafer cleaning technology [electronic resource] / edited by Karen A. Reinhardt, Werner Kern.

The second Edition of the Handbook of Silicon Wafer Cleaning Technology is intended to provide knowledge of wet, plasma, and other surface conditioning techniques used to manufacture integrated circuits. The integration of the clean processes into the device manufacturing flow will be presented with...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Other Authors:	Reinhardt, Karen A., Kern, Werner, 1925-
Format:	Electronic eBook
Language:	English
Published:	Norwich, NY : William Andrew, ©2008.
Edition:	2nd ed.
Series:	Materials science and process technology series.
Subjects:	Silicon-on-insulator technology. Handbooks and manuals.