The materials science of thin films [electronic resource] / Milton Ohring.

This is the first available textbook to provide comprehensive coverage of the science and technology of thin films and coatings. Developed for upper-level undergraduate and beginning graduate students, the book discusses physical and chemical vapor deposition processes; phenomena involving nucleatio...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Main Author:	Ohring, Milton, 1936-
Corporate Author:	Elsevier Science Publishers
Format:	Electronic eBook
Language:	English
Published:	Boston : Academic Press, ©1992.
Subjects:	Thin films.