Modeling of film deposition for microelectronic applications [electronic resource] / edited by Stephen Rossnagel.
Physics of Thin Films is one of the longest running continuing series in thin film science, consisting of 22 volumes since 1963. The series contains quality studies of the properties of various thin filmsmaterials and systems. In order to be able to reflect the development of today's science an...
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| Online Access: |
Full Text (via ScienceDirect) |
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| Other Authors: | |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
San Diego :
Academic Press,
©1996.
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| Series: | Thin films (San Diego, Calif.) ;
v. 22. |
| Subjects: |
Internet
Full Text (via ScienceDirect)Online
| Call Number: |
QC176.A1 T48 v.22eb
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| QC176.A1 T48 v.22eb | Available |