Handbook of low and high dielectric constant materials and their applications [electronic resource] / edited by Hari Singh Nalwa.

Recent developments in microelectronics technologies have created a great demand for interlayer dielectric materials with a very low dielectric constant. They will play a crucial role in the future generation of IC devices (VLSI/UISI and high speed IC packaging). Considerable efforts have been made...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Other Authors:	Nalwa, Hari Singh, 1954-
Format:	Electronic eBook
Language:	English
Published:	San Diego : Academic Press, ©1999.
Subjects:	Integrated circuits > Materials. Dielectrics.