Comprehensive microsystems / editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe.

Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.

Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Other Authors:	Gianchandani, Yogesh B., Tabata, Osamu, 1956-, Zappe, Hans P.
Format:	eBook
Language:	English
Published:	Amsterdam ; Oxford : Elsevier, ©2008.
Subjects:	Microelectromechanical systems.