Comprehensive microsystems / editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe.
Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications.
Saved in:
| Online Access: |
Full Text (via ScienceDirect) |
|---|---|
| Other Authors: | , , |
| Format: | eBook |
| Language: | English |
| Published: |
Amsterdam ; Oxford :
Elsevier,
©2008.
|
| Subjects: |
MARC
| LEADER | 00000cam a22000004a 4500 | ||
|---|---|---|---|
| 001 | b10318992 | ||
| 003 | CoU | ||
| 005 | 20190126012400.9 | ||
| 006 | m o d | ||
| 007 | cr ||||||||||| | ||
| 008 | 080417s2008 ne a ob 001 0 eng d | ||
| 019 | |a 527382962 |a 656361204 |a 771916869 | ||
| 020 | |z 9780444521903 | ||
| 020 | |z 0444521909 | ||
| 020 | |z 9780444521941 |q (hbk.) | ||
| 020 | |z 0444521941 |q (hbk.) | ||
| 035 | |a (OCoLC)scd225171209 | ||
| 035 | |a (OCoLC)225171209 |z (OCoLC)527382962 |z (OCoLC)656361204 |z (OCoLC)771916869 | ||
| 040 | |a STF |b eng |e pn |c STF |d STF |d OKU |d OPELS |d OCLCQ |d UIU |d OCLCF |d UIU |d YDXCP |d GGVRL |d OCLCQ |d D6H | ||
| 049 | |a GWRE | ||
| 050 | 4 | |a TK7875 |b .C66 2008 | |
| 245 | 0 | 0 | |a Comprehensive microsystems / |c editors-in-chief, Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe. |
| 260 | |a Amsterdam ; |a Oxford : |b Elsevier, |c ©2008. | ||
| 300 | |a 1 online resource (3 volumes) : |b illustrations (some color) | ||
| 336 | |a text |b txt |2 rdacontent. | ||
| 337 | |a computer |b c |2 rdamedia. | ||
| 338 | |a online resource |b cr |2 rdacarrier. | ||
| 505 | 0 | |a v. 1. Materials ; Fabrication and packaging ; Electronics and systems design -- v. 2. Actuation mechanism ; Physical sensing ; Chemical and biological systems -- v. 3. Optical systems ; Industrial applications ; Emerging topics ; Index. | |
| 504 | |a Includes bibliographical references and index. | ||
| 520 | |a Provides an overview of the wide range of topics which comprise the microsystems field, including, design and materials, fabrication and packaging, optical systems, chemical and biological systems, physical sensors, actuation, electronics for MEMS and industrial applications. | ||
| 588 | 0 | |a Print version record. | |
| 650 | 0 | |a Microelectromechanical systems. | |
| 650 | 7 | |a Microelectromechanical systems. |2 fast |0 (OCoLC)fst01019745. | |
| 700 | 1 | |a Gianchandani, Yogesh B. | |
| 700 | 1 | |a Tabata, Osamu, |d 1956- | |
| 700 | 1 | |a Zappe, Hans P. | |
| 776 | 0 | 8 | |i Print version: |t Comprehensive microsystems. |d Amsterdam ; Oxford : Elsevier, ©2008 |z 9780444521941 |w (OCoLC)76910691. |
| 856 | 4 | 0 | |u https://colorado.idm.oclc.org/login?url=https://www.sciencedirect.com/science/referenceworks/9780444521903 |z Full Text (via ScienceDirect) |
| 907 | |a .b103189920 |b 07-02-19 |c 02-05-19 | ||
| 998 | |a web |b - - |c f |d b |e - |f eng |g ne |h 0 |i 1 | ||
| 915 | |a 4 | ||
| 956 | |a ScienceDirect ebooks | ||
| 956 | |b ScienceDirect All Books | ||
| 999 | f | f | |i d10180bd-0873-5552-985a-f1de8081b50b |s fbdb23b2-ae10-5174-9034-4e03498aa0ae |
| 952 | f | f | |p Can circulate |a University of Colorado Boulder |b Online |c Online |d Online |e TK7875 .C66 2008 |h Library of Congress classification |i web |n 1 |