Handbook of ellipsometry / edited by Harland G. Tompkins and Eugene A. Irene.

The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated c...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Other Authors:	Tompkins, Harland G., Irene, Eugene A.
Format:	eBook
Language:	English
Published:	Norwich, NY : Heidelberg, Germany : William Andrew Pub. ; Springer, ©2005.
Subjects:	Ellipsometry.