Thin film processes [electronic resource] / edited by John L. Vossen, Werner Kern.

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the p...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Other Authors:	Vossen, John L., Kern, Werner, 1925-
Format:	Electronic eBook
Language:	English
Published:	New York : Academic Press, 1978.
Subjects:	Thin films.