Thin film processes [electronic resource] / edited by John L. Vossen, Werner Kern.
Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the p...
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| Online Access: |
Full Text (via ScienceDirect) |
|---|---|
| Other Authors: | , |
| Format: | Electronic eBook |
| Language: | English |
| Published: |
New York :
Academic Press,
1978.
|
| Subjects: |
MARC
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| 245 | 0 | 0 | |a Thin film processes |h [electronic resource] / |c edited by John L. Vossen, Werner Kern. |
| 260 | |a New York : |b Academic Press, |c 1978. | ||
| 300 | |a 1 online resource (xi, 564 pages) : |b illustrations. | ||
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| 504 | |a Includes bibliographical references and index. | ||
| 520 | |a Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process. | ||
| 588 | 0 | |a Print version record. | |
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| 700 | 1 | |a Vossen, John L. |0 http://id.loc.gov/authorities/names/n78043611 |1 http://isni.org/isni/0000000063309698. | |
| 700 | 1 | |a Kern, Werner, |d 1925- |0 http://id.loc.gov/authorities/names/n90703751 |1 http://isni.org/isni/0000000084386043. | |
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