Rapid thermal processing [electronic resource] : science and technology / edited by Richard B. Fair.

This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from...

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Bibliographic Details

Online Access:	Full Text (via ScienceDirect)
Other Authors:	Fair, Richard B.
Format:	Electronic eBook
Language:	English
Published:	Boston : Academic Press, ©1993.
Subjects:	Semiconductors > Heat treatment. Semiconductor doping. Rapid thermal processing.