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Rapid thermal processing [electronic resource] : science and technology / edited by Richard B. Fair.

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This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from...

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Bibliographic Details
Online Access: Full Text (via ScienceDirect)
Other Authors: Fair, Richard B.
Format: Electronic eBook
Language:English
Published: Boston : Academic Press, ©1993.
Subjects:
Semiconductors > Heat treatment.
Semiconductor doping.
Rapid thermal processing.
Table of Contents:
  • 1. Rapid Thermal Processing
  • A Justification / Richard B. Fair
  • 2. Rapid Thermal Processing-Based Epitaxy / J.L. Hoyt
  • 3. Rapid Thermal Growth and Processing of Dielectrics / Hisham Z. Massoud
  • 4. Thin-Film Deposition / Mehmet C. Ozturk
  • 5. Extended Defects from Ion Implantation and Annealing / Kevin S. Jones and George A. Rozgonyi
  • 6. Junction Formation in Silicon by Rapid Thermal Annealing / Richard B. Fair
  • 7. Silicides / C.M. Osburn
  • 8. Issues in Manufacturing Unique Silicon Devices Using Rapid Thermal Annealing / B. Lojek
  • 9. Manufacturing Equipment Issues in Rapid Thermal Processing / Fred Roozeboom.

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