Handbook of silicon based MEMS : materials & technologies / edited by Veikko Lindroos [and five others]

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Bibliographic Details
Online Access:	Full Text (via ProQuest)
Other Authors:	Lindroos, Veikko (Editor)
Format:	eBook
Language:	English
Published:	Norwich : William Andrew, 2015.
Edition:	Second edition.
Series:	Micro & nano technologies.
Subjects:	Microelectromechanical systems. Microelectromechanical systems > Materials. Silicon > Electric properties.

Internet

Full Text (via ProQuest)

Holdings details from Online
Call Number:	TK7875 .H36 2015
TK7875 .H36 2015	Available