Resolution enhancement techniques in optical lithography [electronic resource] / Alfred Kwok-Kit Wong.

Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolutio...

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Bibliographic Details

Online Access:	Full Text (via SPIE Digital Library)
Main Author:	Wong, Alfred Kwok-Kit
Format:	Electronic eBook
Language:	English
Published:	Bellingham, Wash. : SPIE Press, ©2001.
Series:	Tutorial texts in optical engineering ; v. TT 47.
Subjects:	Integrated circuits > Design and construction. Microlithography.