Some considerations regarding film thickness standards for the semiconductor industry / James R. Ehrstein.

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Bibliographic Details
Online Access:	Online Access
Main Author:	Ehrstein, James R.
Corporate Author:	United States. National Bureau of Standards
Format:	Government Document eBook
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1980.
Series:	NBSIR ; 80-2158.

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Call Number:	C 13.58:80-2158
C 13.58:80-2158	Available