MEMS : applications / edited by Mohamed Gad-el-Hak.

As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Togethe...

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Bibliographic Details

Online Access:	Full Text (via Taylor & Francis)
Other Authors:	Gad-el-Hak, Mohamed, 1945-
Format:	eBook
Language:	English
Published:	Boca Raton, FL : CRC Press/Taylor & Francis, 2006.
Edition:	2nd ed.
Series:	Mechanical engineering series (Boca Raton, Fla.)
Subjects:	Microelectromechanical systems. Detectors. Microactuators. Robots.