Standard reference materials : antireflecting-chromium linewidth standard, SRM 475, for calibration of optical microscope linewidth measuring systems / Carol F. Vezzetti, Ruth N. Varner.
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Format: | Government Document eBook |
Language: | English |
Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
1992.
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Series: | NIST special publication ;
260-117. |
Internet
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Call Number: |
C 13.10:260-117
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C 13.10:260-117 | Available |