Accurate linewidth measurements on integrated-circuit photomasks / John M. Jerke.

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Bibliographic Details
Online Access:	Online Access
Main Author:	Jerke, John M.
Corporate Author:	United States. National Bureau of Standards
Format:	Government Document eBook
Language:	English
Published:	Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1980.
Series:	NBS special publication ; 400-43.

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Call Number:	C 13.10:400-43
C 13.10:400-43	Available