Accurate linewidth measurements on integrated-circuit photomasks / John M. Jerke.
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| Online Access: |
Online Access |
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| Format: | Government Document eBook |
| Language: | English |
| Published: |
Gaithersburg, MD :
U.S. Dept. of Commerce, National Institute of Standards and Technology,
1980.
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| Series: | NBS special publication ;
400-43. |
| Item Description: | 1980. Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes. Title from PDF title page. |
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| Physical Description: | 1 online resource. |
| Bibliography: | Includes bibliographical references. |