Vacuum and ultravacuum [electronic resource] : physics and technology / Igor Bello.

"Vacuum technology has enormous impact on human life in many aspects and fields, such as metallurgy, material development and production, food and electronic industry, microelectronics, device fabrication, physics, materials science, space science, engineering, chemistry, technology of low temp...

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Bibliographic Details

Online Access:	Full Text (via Taylor & Francis)
Main Author:	Bello, Igor (Author)
Format:	Electronic eBook
Language:	English
Published:	Boca Raton : CRC Press, 2017.
Subjects:	Vacuum. Ultrahigh vacuum. Vacuum technology.