Contamination-free manufacturing for semiconductors and other precision products / by Robert P. Donovan.

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Bibliographic Details
Online Access:	Full Text (via Taylor & Francis)
Main Author:	Donovan, R. P. (Author)
Format:	eBook
Language:	English
Published:	Boca Raton, FL : CRC Press, an imprint of Taylor and Francis, 2001.
Edition:	First edition.
Subjects:	Fertigung. Halbleitertechnologie. Semiconductors > Defects. Semiconductors > Design and construction.

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Call Number:	TK7871.85
TK7871.85	Available