Microlithography : science and technology / edited by Bruce W. Smith and Kazuaki Suzuki.

"Like the bestselling original, this third edition of Microlithography is a self-contained text detailing both elementary and advanced aspects of submicron microlithography, offering a balanced treatment of theoretical and operating practices"--

Bibliographic Details

Online Access:	Full Text (via Taylor & Francis)
Other Authors:	Smith, Bruce W., 1959- (Editor), Suzuki, Kazuaki (Editor)
Format:	eBook
Language:	English
Published:	Boca Raton : CRC Press, 2020.
Edition:	Third edition.
Subjects:	Microlithography > Industrial applications. Integrated circuits > Masks. Metal oxide semiconductors, Complementary > Design and construction. Manufacturing processes.