Semiconductor manufacturing technology [electronic resource] / Chue San Yoo.

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Bibliographic Details
Online Access:	Full Text (via ProQuest)
Main Author:	Yoo, Chue San
Format:	Electronic eBook
Language:	English
Published:	Hackensack, N.J. ; London : World Scientific, ©2008.
Series:	Advanced series in electrical and computer engineering ; v. 13.
Subjects:	Semiconductors > Design and construction. Semiconductor industry.

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Full Text (via ProQuest)

Holdings details from Online
Call Number:	TK7871.85 .Y66 2008
TK7871.85 .Y66 2008	Available