Dual-mass linear vibration silicon-based MEMS gyroscope / Huiliang Cao.

This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control syst...

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Bibliographic Details

Online Access:	Full Text (via Springer)
Main Author:	Cao, Huiliang (Author)
Format:	eBook
Language:	English
Published:	Singapore : [China] : Springer ; National Defense Industry Press, [2023]
Subjects:	Gyroscopes. Microelectromechanical systems. Silicon > Industrial applications.