Multichamber and in-situ processing of electronic materials : 10-11 October 1989, Santa Clara, California / Robert S. Freund, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering ; cooperating organzations: Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison, SEMATECH.

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Bibliographic Details
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, North Carolina State University. Center for Advanced Electronic Materials Processing, University of Wisconsin--Madison. Engineering Research Center for Plasma-Aided Manufacturing, SEMATECH
Other Authors:	Freund, Robert S.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, ©1990.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 1188.
Subjects:	Electronics > Materials > Congresses. Semiconductors > Congresses. Integrated circuits > Very large scale integration > Congresses.

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Call Number:	TK7836 .M85 1990
TK7836 .M85 1990	Available Place a Hold