Hydrogenated amorphous silicon alloy deposition processes / Werner Luft, Y. Simon Tsuo.

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Bibliographic Details
Main Author:	Luft, Werner
Other Authors:	Tsuo, Y. Simon
Format:	Book
Language:	English
Published:	New York : M. Dekker, ©1993.
Series:	Applied physics series (Marcel Dekker, Inc.) ; 1.
Subjects:	Thin film devices > Design and construction. Silicon alloys. Plasma-enhanced chemical vapor deposition. Thin films > Optical properties. Thin films > Electric properties.

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