Hydrogenated amorphous silicon alloy deposition processes / Werner Luft, Y. Simon Tsuo.
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
New York :
M. Dekker,
©1993.
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| Series: | Applied physics series (Marcel Dekker, Inc.) ;
1. |
| Subjects: |
| Physical Description: | xiv, 327 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references (pages 243-316) and index. |
| ISBN: | 0824791460 (acid-free paper) |