Diffractometry and scatterometry : 24-28 May 1993 / Maksymilian Pluta, Mariusz Szyjer, chairs/editors ; organized by SPIE Poland Chapter, Institute of Applied Optics, Warsaw.
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Corporate Authors: | , |
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Other Authors: | , |
Format: | Book |
Language: | English |
Published: |
Bellingham, Wash., USA :
SPIE,
©1994.
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Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 1991. |
Subjects: |
PASCAL Offsite
Call Number: |
QC414.8 .D545 1994
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QC414.8 .D545 1994 | Available Place a Hold |