Diffractometry and scatterometry : 24-28 May 1993 / Maksymilian Pluta, Mariusz Szyjer, chairs/editors ; organized by SPIE Poland Chapter, Institute of Applied Optics, Warsaw.
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Corporate Authors: | , |
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Other Authors: | , |
Format: | Book |
Language: | English |
Published: |
Bellingham, Wash., USA :
SPIE,
©1994.
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Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 1991. |
Subjects: |
Physical Description: | xvi, 268 pages : illustrations, portraits ; 28 cm. |
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Bibliography: | Includes bibliographical references and indexes. |
ISBN: | 0819412406 |
Action Note: | committed to retain 20230101 20480101 Alliance Shared Trust https://www.coalliance.org/shared-print-archiving-policies. |