Diffractometry and scatterometry : 24-28 May 1993 / Maksymilian Pluta, Mariusz Szyjer, chairs/editors ; organized by SPIE Poland Chapter, Institute of Applied Optics, Warsaw.

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Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers. Poland Chapter, Institute of Applied Optics (Poland)
Other Authors: Pluta, Maksymilian, Szyjer, Mariusz
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, ©1994.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 1991.
Subjects:
Description
Physical Description:xvi, 268 pages : illustrations, portraits ; 28 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:0819412406
Action Note:committed to retain 20230101 20480101 Alliance Shared Trust https://www.coalliance.org/shared-print-archiving-policies.