Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems [microform] : standard reference materials / Carol F. Vezzetti, Ruth N. Varner, James E. Potzick.

Saved in:

Bibliographic Details
Main Author:	Vezzetti, Carol F.
Corporate Author:	National Institute of Standards and Technology (U.S.)
Other Authors:	Varner, Ruth N., Potzick, James E.
Other title:	Standard reference materials. Antireflecting chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems.
Format:	Government Document Microfilm Book
Language:	English
Published:	Gaithersburg, MD : [Springfield, VA] : U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology ; [Order from National Technical Information Service], [1992]
Series:	NIST special publication ; 260-117.
Subjects:	Microscopes > Calibration > Standards. Integrated circuits > Masks > Measurement. Chromium > Spectra > Standards.

Norlin Library - Government Information - Microform

Holdings details from Norlin Library - Government Information - Microform
Call Number:	C 13.10:260-119
C 13.10:260-119	Restricted Place a Hold