Semiconductor measurement technology [microform] : evolution of silicon materials characterization : lessons learned for improved manufacturing / W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology"
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| Main Author: | |
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| Other title: | Evolution of silicon materials characteristics, lessons learned for improved manufacturing. |
| Format: | Government Document Microfilm Book |
| Language: | English |
| Published: |
Gaithersburg, MD : Washington, D.C. :
U.S. Dept. of Commerce, National Institute of Standards and Technology ; For sale by the Supt. of Docs., U.S. G.P.O.,
1993.
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| Series: | NIST special publication ;
400-92. |
| Subjects: |
Norlin Library - Government Information - Microform
| Call Number: |
C 13.10:400-92
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| C 13.10:400-92 | Restricted Place a Hold |