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|a (OCoLC)ocm30143803
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|a (GPO)94085486
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| 037 |
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|a 003-003-03224-7
|b GPO
|f paper copy
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|d GPO
|d DLC
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|a n-us---
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|a COD9
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|a 0247 (MF)
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|a C 13.10:400-92
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|a C 13.10:400-92
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| 100 |
1 |
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|a Bullis, W. Murray,
|d 1930-
|0 http://id.loc.gov/authorities/names/n80090215
|1 http://isni.org/isni/0000000080941222.
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| 245 |
1 |
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|a Semiconductor measurement technology
|h [microform] :
|b evolution of silicon materials characterization : lessons learned for improved manufacturing /
|c W. Murray Bullis ; prepared for Semiconductor Electronics Division, Electronics and Electrical Engineering Laboratory, National Institute of Standards and Technology"
|
| 260 |
|
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|a Gaithersburg, MD :
|b U.S. Dept. of Commerce, National Institute of Standards and Technology ;
|a Washington, D.C. :
|b For sale by the Supt. of Docs., U.S. G.P.O.,
|c 1993.
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| 300 |
|
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|a iv, 27, 201-211 pages :
|b illustrations ;
|c 28 cm.
|
| 336 |
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|a text
|b txt
|2 rdacontent.
|
| 337 |
|
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|a microform
|b h
|2 rdamedia.
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| 338 |
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|a microfiche
|b he
|2 rdacarrier.
|
| 490 |
1 |
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|a NIST special publication ;
|v 400-92.
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| 500 |
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|a Distributed to depository libraries in microfiche.
|
| 500 |
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|a Shipping list number: 94-0057-P.
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| 500 |
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|a Paper version no longer for sale by the Supt. of Docs.
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| 500 |
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|a "July 1993."
|
| 504 |
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|a Includes bibliographical references (pages 23-25)
|
| 533 |
|
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|a Microfiche.
|b [Washington, D.C.?] :
|c Supt. of Docs., U.S. G.P.O.,
|d [1994]
|e 1 microfiche : negative.
|
| 650 |
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0 |
|a Semiconductors.
|0 http://id.loc.gov/authorities/subjects/sh85119903.
|
| 650 |
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0 |
|a Semiconductor wafers.
|0 http://id.loc.gov/authorities/subjects/sh85119902.
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| 650 |
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0 |
|a Integrated circuits
|x Wafer-scale integration
|z United States.
|
| 710 |
2 |
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|a National Institute of Standards and Technology (U.S.).
|b Semiconductor Electronics Division.
|0 http://id.loc.gov/authorities/names/no90015380.
|
| 740 |
0 |
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|a Evolution of silicon materials characteristics, lessons learned for improved manufacturing.
|
| 830 |
|
0 |
|a NIST special publication ;
|v 400-92.
|0 http://id.loc.gov/authorities/names/n88507958.
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| 907 |
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|a .b23012146
|b 03-18-20
|c 12-08-95
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| 998 |
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|b 03-21-95
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|a .b23012146
|b 05-10-19
|c 12-08-95
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| 944 |
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|a MARS - RDA ENRICHED
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| 907 |
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|a .b23012146
|b 12-18-08
|c 12-08-95
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| 952 |
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f |
|p Can circulate
|a University of Colorado Boulder
|b Boulder Campus
|c Norlin
|d Norlin Library - Government Information - Microform
|e C 13.10:400-92
|h Superintendent of Documents classification
|i document
|n 1
|
