An overview of CVD processes [microform] / S. Okamoto.

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Bibliographic Details
Main Author:	Okamoto, S.
Corporate Author:	United States. National Aeronautics and Space Administration
Format:	Government Document Microfilm Book
Language:	English
Published:	Washington DC : National Aeronautics and Space Administration, [1986]
Series:	NASA technical memorandum ; 88450.
Subjects:	Plasma-enhanced chemical vapor deposition.

Norlin Library - Government Information - Microform

Holdings details from Norlin Library - Government Information - Microform
Call Number:	NAS 1.15:88450
NAS 1.15:88450	Restricted Place a Hold