In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II : 23-24 September, 1998, Santa Clara, California / Sergio Ajuria, Tim Z. Hossain, chairs/editors ; sponsored ... by SPIE--The International Society for Optical Engineering ; cooperating organizations, Solid State Technology [and others]
Saved in:
| Corporate Authors: | , |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
©1998.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3509. |
| Subjects: |
En Route to PASCAL
| Call Number: |
TK7871.85 .I482 1998
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| TK7871.85 .I482 1998 | Checked out – Due: 04-12-2027 |