In-line characterization techniques for performance and yield enhancement in microelectronic manufacturing II : 23-24 September, 1998, Santa Clara, California / Sergio Ajuria, Tim Z. Hossain, chairs/editors ; sponsored ... by SPIE--The International Society for Optical Engineering ; cooperating organizations, Solid State Technology [and others]

Saved in:
Bibliographic Details
Corporate Authors: Society of Photo-Optical Instrumentation Engineers, Solid State Technology (Organization)
Other Authors: Ajuria, Sergio, Hossain, Tim Z.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, ©1998.
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3509.
Subjects:

En Route to PASCAL

Holdings details from En Route to PASCAL
Call Number: TK7871.85 .I482 1998
TK7871.85 .I482 1998 Checked out Due: 04-12-2027