Microstructural and electrical properties of resolidified submicron Al lines / door Marc Jan Christiaan van den Homberg.

Saved in:

Bibliographic Details
Main Author:	Homberg, Marc Jan Christiaan van den, 1970-
Format:	Thesis Book
Language:	English
Published:	Delft : Delft University Press, ©1998.
Subjects:	Aluminum films. Microstructure. Electrodiffusion. Integrated circuits > Design and construction.

PASCAL Offsite

Holdings details from PASCAL Offsite
Call Number:	TK7874 .H65 1998
TK7874 .H65 1998	Available Place a Hold