Evaluation of a procedure for the measurement of thin film thickness by X-ray reflectivity [microform] / Jeannette Benavides.

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Bibliographic Details
Main Author:	Benavides, Jeannette
Corporate Author:	Goddard Space Flight Center
Format:	Government Document Microfilm Book
Language:	English
Published:	Greenbelt, Md. : [Springfield, Va.] : National Aeronautics and Space Administration, Goddard Space Flight Center ; [National Technical Information Service, distributor], 1997.
Series:	NASA technical paper ; 3697.
Subjects:	Thin films. Film thickness. Silicon dioxide. Solid state devices. Measuring instruments. X rays. Reflectance. X ray diffraction.

Norlin Library - Government Information - Microform

Holdings details from Norlin Library - Government Information - Microform
Call Number:	NAS 1.60:3697
NAS 1.60:3697	Restricted Place a Hold