Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers [microform] / D.J. Larkin.

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Bibliographic Details
Main Author:	Larkin, D. J.
Corporate Author:	United States. National Aeronautics and Space Administration
Other title:	Site competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers.
Format:	Government Document Microfilm Book
Language:	English
Published:	[Washington, DC] : [Springfield, Va.] : [National Aeronautics and Space Administration] ; [National Technical Information Service, distributor], [1995]
Series:	NASA technical memorandum ; 112474.
Subjects:	Silicon. Vapor deposition. Epitaxy. Additives. Nitrogen.

Norlin Library - Government Information - Microform

Holdings details from Norlin Library - Government Information - Microform
Call Number:	NAS 1.15:112474
NAS 1.15:112474	Restricted Place a Hold