Site-competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers [microform] / D.J. Larkin.
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| Main Author: | |
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| Corporate Author: | |
| Other title: | Site competition epitaxy for n-type and p-type dopant control in CVD SiC epilayers. |
| Format: | Government Document Microfilm Book |
| Language: | English |
| Published: |
[Washington, DC] : [Springfield, Va.] :
[National Aeronautics and Space Administration] ; [National Technical Information Service, distributor],
[1995]
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| Series: | NASA technical memorandum ;
112474. |
| Subjects: |
| Item Description: | Shipping list number: 99-0055-M. |
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| Physical Description: | 1 volume. |
| Reproduction Note: | Microfiche. |