Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) [and others]

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Bibliographic Details
Corporate Authors:	Society of Photo-Optical Instrumentation Engineers, Institution of Radio and Electronics Engineers, Australia, Queensland. Government State Development, Griffith University Microelectronics Engineering Society
Other Authors:	Courtois, B. (Bernard), Demidenko, S. N. (Sergeĭ Nikolaevich)
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, ©1999.
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3893.
Subjects:	Microelectromechanical systems > Congresses. Microelectromechanical systems > Design and construction > Congresses. Microelectronic packaging > Congresses. Optoelectronic devices > Design and construction > Congresses.

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Call Number:	TK7875 .D48 1999
TK7875 .D48 1999	Available Place a Hold