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|a CODI
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| 090 |
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|a TK7875
|b .D48 1999
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| 245 |
0 |
0 |
|a Design, characterization, and packaging for MEMS and microelectronics :
|b 27-29 October 1999, Royal Pines Resort, Queensland, Australia /
|c Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) [and others]
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| 260 |
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|a Bellingham, Wash., USA :
|b SPIE,
|c ©1999.
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| 300 |
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|a x, 512 pages :
|b illustrations ;
|c 28 cm.
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| 336 |
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|a text
|b txt
|2 rdacontent.
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| 337 |
|
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|a unmediated
|b n
|2 rdamedia.
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| 338 |
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|a volume
|b nc
|2 rdacarrier.
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| 490 |
1 |
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|a SPIE proceedings series ;
|v v. 3893.
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| 504 |
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|a Includes bibliographical references and index.
|
| 583 |
1 |
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|a committed to retain
|c 20240101
|d 20490101
|5 CoU
|f Alliance Shared Trust
|u https://www.coalliance.org/shared-print-archiving-policies
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| 650 |
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|a Microelectromechanical systems
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008107748.
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| 650 |
|
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|a Microelectromechanical systems
|x Design and construction
|v Congresses.
|
| 650 |
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0 |
|a Microelectronic packaging
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008107750.
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| 650 |
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|a Optoelectronic devices
|x Design and construction
|v Congresses.
|0 http://id.loc.gov/authorities/subjects/sh2008108685.
|
| 700 |
1 |
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|a Courtois, B.
|q (Bernard)
|0 http://id.loc.gov/authorities/names/n89666779.
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| 700 |
1 |
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|a Demidenko, S. N.
|q (Sergeĭ Nikolaevich)
|0 http://id.loc.gov/authorities/names/n85287184
|1 http://isni.org/isni/0000000116417239.
|
| 710 |
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|a Society of Photo-Optical Instrumentation Engineers.
|0 http://id.loc.gov/authorities/names/n78088934
|1 http://isni.org/isni/0000000122965856.
|
| 710 |
2 |
|
|a Institution of Radio and Electronics Engineers, Australia.
|0 http://id.loc.gov/authorities/names/n50077663
|1 http://isni.org/isni/0000000121921958.
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| 710 |
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|a Queensland.
|b Government State Development.
|0 http://id.loc.gov/authorities/names/n2001005860.
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| 710 |
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|a Griffith University Microelectronics Engineering Society.
|0 http://id.loc.gov/authorities/names/no00007313.
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| 830 |
|
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|a Proceedings of SPIE--the International Society for Optical Engineering ;
|v v. 3893.
|0 http://id.loc.gov/authorities/names/n42030541.
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|c Offsite
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|e TK7875 .D48 1999
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