Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia / Bernard Courtois, Serge Demidenko, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society (Australia), [and] Queensland Government State Development (Australia) ; cooperating organizations, LeGUMES--the Griffith University Microelectronics Engineering Society (Australia) [and others]
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| Corporate Authors: | , , , |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
©1999.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3893. |
| Subjects: |
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