Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. / editors, Maarten P. de Boer [and others]
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
©2000.
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| Series: | Materials Research Society symposia proceedings ;
v. 605. |
| Subjects: |
Closed Stacks - Engineering Math & Physics Library - Stacks
| Call Number: |
TK7875 .M38 2000
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| TK7875 .M38 2000 | Available Place a Hold |