Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore / Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others]
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| Corporate Authors: | , , |
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| Other Authors: | , |
| Other title: | Microlithographic techniques in IC fabrication. |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
©2000.
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| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4226. |
| Subjects: |
PASCAL Offsite
| Call Number: |
TK7835 .M436 2000
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| TK7835 .M436 2000 | Available Place a Hold |
Online
| Call Number: |
TK7835 .M436 2000
|
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