Microlithographic techniques in integrated circuit fabrication II : 28-30 November 2000, Singapore / Chris A. Mack, Xiaocong Yuan, chairs/editors ; sponsored by Nanyang Technological University (Singapore) [and] SPIE--the International Society for Optical Engineering ; cooperating organizations, Institute of Physics (Singapore) [and others]
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| Corporate Authors: | , , |
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| Other Authors: | , |
| Other title: | Microlithographic techniques in IC fabrication. |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
©2000.
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4226. |
| Subjects: |
| Item Description: | Earlier conference has title: Microlithographic techniques in IC fabrication. |
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| Physical Description: | xv, 194 pages : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819438987 |
| Action Note: | committed to retain 20240101 2049101 Alliance Shared Trust https://www.coalliance.org/shared-print-archiving-policies |