Contamination-free manufacturing for semiconductors and other precision products / edited by Robert P. Donovan.
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Marcel Dekker,
©2001.
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| Subjects: |
| Physical Description: | x, 448 pages : illustrations ; 24 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0824703804 (alk. paper) |