PVD for microelectronics : sputter deposition applied to semiconductor manufacturing / Ronald A. Powell, Stephen M. Rossnagel.
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| Main Author: | |
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| Other Authors: | |
| Format: | Book |
| Language: | English |
| Published: |
San Diego :
Academic Press,
©1999.
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| Series: | Thin films (San Diego, Calif.) ;
v. 26. |
| Subjects: |
PASCAL Offsite
| Call Number: |
QC176.A1 P5 vol. 26
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| QC176.A1 P5 vol. 26 | Available Place a Hold |