Lecture notes on principles of plasma processing / Francis F. Chen and Jane P. Chang.

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Bibliographic Details
Main Author:	Chen, Francis F., 1929-
Other Authors:	Chang, Jane P., 1970-
Other title:	Principles of plasma processing.
Format:	Book
Language:	English
Published:	New York : Kluwer Academic/Plenum Publishers, 2003.
Subjects:	Plasma engineering. Plasma chemistry. Plasma dynamics.

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Holdings details from Closed Stacks - Engineering Math & Physics Library - Stacks
Call Number:	TA2020 .C454 2003
TA2020 .C454 2003	Available Place a Hold